Selective High Throughput TiN Etching Methods ensp 0183 ensp Titanium nitride TiN is widely used as a hard mask film protecting the inter level dielectric ILD before metal or plating seed layer deposition steps It is common practice to use a wet etch in order to remove residues formed during the ILD dry etch step and at the same time to remove some or all of the exposed TiN From its
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